Automated Storage/Retrieval in Cleanroom During Semiconductor Wafer Production

Features


* Each Front Opening Unified Pod contains a stack of 12" wafers
* Every FOUP weighs total 33 lbs
* Simultaneous horizontal/vertical movement
* Smoothly store/retrieve/transport FOUPs
* Each FOUP ID is indentified by Radio Frequency ID (RFID) reader
* Positioning pins of every cell precisely secure each FOUP
* Precision & speed performed in strictly controlled cleanrooms